• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    It is proposed for a support device (2) for a magnetron system with a rotating target, comprising a housing (22) with a rotatably mounted drive shaft (26) disposed in the housing (22), which is designed at its end accessible from the outside of the housing (22) to be connected directly or indirectly to the rotating target (3) and which is designed at its end located inside the housing (22) to induce a rotational torque, an electric motor (4) with a stator (42) and a rotor (43) for producing a rotational torque is disposed within the housing (22).
    公开号:BE1019874A5
    申请号:E2010/0717
    申请日:2010-11-30
    公开日:2013-02-05
    发明作者:Goetz Teschner；Hans-Juergen Heinrich；Harald Grune；Sven Haehne
    申请人:Ardenne Anlagentech Gmbh；
    IPC主号:
    专利说明:

    "Support device for a magnetron system with a rotating target"
    A support device for a magnetron system with a rotating target, which has a minimal disturbance sensitivity when operating with a medium frequency current, i.e. in the range of a few hundred hertz up to at around 50 kilohertz, will be described below.
    In the vacuum coating technology, magnetron systems with a rotating target are known, in which a most often tubular target surrounds a magnet structure, the tubular target being rotatably mounted and driven in such a way that the target material be removed evenly. The tubular target is generally fixed in the vacuum chamber between two terminal blocks which are constructed in such a way that they respectively allow the rotational mounting of the tubular target. Most often, different functions are, in this case, assigned to the two terminal blocks. One of the terminal blocks is, in general, embodied as a terminal supply block for supplying the magnetron with cooling water and electrical energy and the other terminal block is designed as a terminal drive block for inducing a rotation torque. intended to generate the rotation of the tubular target.
    For this purpose, known end blocks have an electromechanical drive device in the form of an electric gear motor which induces the rotational torque, for example by means of conical gears, cylindrical gears or toothed belts. . This drive must be potential free and must therefore be mounted isolated from the target and the vacuum chamber. Therefore, in known drive terminal blocks, the drive device is incorporated in the drive terminal block using insulators so that the electric motor is generally on the atmosphere side outside the drive chamber. and that a transmission or portions of a transmission or other torque transmission devices such as belt drives and the like are disposed within the drive terminal block. Depending on the height of the process voltage, the cost for potential separation can be very high to reliably obtain that the process voltage applied to the tubular target does not discharge to the drive device or the vacuum chamber. An example of such a terminal block is known from patent application EP 1 365 436 A2.
    DE 10 2008 033 904 discloses, however, a drive terminal block for a magnetron system with a rotating target, which has a terminal block housing with a drive shaft which is rotatably mounted. the terminal block housing and is designed at its end accessible from the outside of the terminal block housing to be connected to the rotary target and is designed at its end located inside the terminal block housing to induce a torque of rotation, and comprises an electric motor with a stator and a rotor for producing a rotational torque, the electric motor being disposed within the terminal block housing. In this case, it can be provided according to one embodiment that the electric motor is disposed coaxially with the drive shaft and / or that the torque is directly transmitted to the drive shaft.
    The object of the invention is to provide, starting from the state of the art described, an improved support device which has a minimal sensitivity to disturbances when operating with a medium frequency current. By support device are meant terminal blocks, in particular terminal drive units of the type described above, that is to say devices which are arranged inside the vacuum chamber but also otherwise designed support devices which are arranged, for example, on the atmosphere side outside the vacuum chamber.
    Therefore, there is provided a support device for a magnetron system with a rotating target, comprising a housing with a drive shaft which is rotatably mounted, is disposed in the housing and is designed at its accessible end by the outside of the housing to be indirectly or directly connected to the rotating target and which is designed at its end within the housing to induce rotational torque, the drive shaft being made from a material non-conductive ceramic.
    Therefore, no metal shaft protrudes from the housing as in known terminal blocks but only a non-conductive shaft journal which is suitable for connection to the rotating target and which is of such a length that the resistance of insulation formed by the ceramic shaft journal is sufficiently large to protect the terminal block and the elements disposed therein from influence by the operating current of the rotating target. Those skilled in the art can, where appropriate, calculate or determine in a simple manner the choice of the length of the journal of the drive shaft projecting from the housing as a function of the voltage and the intensity of the current. The disturbance sensitivity to the medium frequency current can therefore be significantly reduced by comparison with known terminal blocks.
    The drive shaft is designed at its end accessible from the outside of the housing to be directly connected to the rotating target when the target can be connected directly to the drive shaft, that is to say when it there is physical contact between the end of the drive shaft and the target. On the other hand, the drive shaft is designed at its end accessible from the outside of the housing to be indirectly connected to the rotating target when another connecting element is arranged between the target and the drive shaft. that is, when there is no physical contact between the end of the drive shaft and the target. Such connecting elements may be, for example, spacers, adapters and the like.
    In an improvement, it is expected that the ceramic drive shaft has in the region that is inside the housing a metal wrapping element enveloping this region. A metal wrapping element in this sense is an envelope of metal material which does not however project from the housing. The wrapping element can be open or closed at the end of the drive shaft located inside the housing. It can be integrally connected in rotation to the ceramic drive shaft so that rotational torque transmission between the ceramic shaft and the metal enclosing element is possible. The metal wrapping element facilitates rotational mounting of the drive shaft in and against the housing, reduces wear due to friction on the seals and increases the resistance of the drive shaft. drive shaft.
    As already customary up to now, it is possible with the proposed support device to incorporate a driving device in the support device such that an electric motor is on the atmosphere side outside the chamber. and that a transmission or portions of a transmission or other torque transmission devices such as belt drives and the like are disposed within the support device.
    In another embodiment of the proposed support device, it is instead provided that an electric motor with a stator and a rotor to produce a rotational torque is disposed within the housing. The electric motor may further be disposed coaxially with the drive shaft. In this case, the torque can be transmitted directly in a particularly simple manner to the drive shaft.
    Direct transmission of the torque of the drive shaft means that the torque is transmitted without slipping and with the same direction of rotation to the drive shaft. This can be achieved for example because the motor shaft on which the rotor is located is concentrically arranged on the drive shaft and is integrally or clutchably connected to the drive shaft. In this case, no transmission component is necessary to transmit to the drive shaft the rotational torque produced by the electric motor. The structure of the support device is considerably simplified with respect to known solutions. This implies at the same time that the electric motor is disposed inside the housing. It is obvious that the electric motor must be installed electrically insulated in the housing and / or that the motor housing must be made from electrically non-conductive material.
    According to another embodiment, it may be provided that a transmission which is designed as a planetary gear is disposed between the electric motor and the drive shaft. The planetary gears have a compact construction form and allow the coaxial arrangement of the motor and the drive shaft. The transmission can be connected to the electric motor and / or the drive shaft by a clutch or can be connected to each of them by a clutch.
    In one embodiment, it is provided that the rotor is disposed directly on the drive shaft so that the drive shaft is at the same time the motor shaft of the electric motor. In other words, the motor shaft of the electric motor is at the same time, in this case, the drive shaft. This further simplification is obtained because the drive shaft is no longer a separate element which must be mounted in the housing and because it is no longer necessary to make a connection between the drive shaft and the drive shaft. 'Arbré motor to transmit the torque.
    In another embodiment, the electric motor is disposed in an auxiliary housing of electrically non-conductive material and the drive shaft is rotatably mounted in the auxiliary housing. With this measurement, the cost of the electrical isolation of the drive shaft is further reduced because the auxiliary housing acts for the drive shaft as an electrical isolation member with respect to the housing. In this case also, the drive shaft and the motor shaft can, of course, be a single element even if it is not necessarily necessary.
    It may, for example, be provided that the rotor of the electric motor is disposed directly on the drive shaft so that the drive shaft is at the same time the motor shaft of the electric motor. The entire drive unit can therefore be made more compact.
    Another simplification of the drive unit results, when provided, from the fact that the stator of the electric motor is disposed directly in the auxiliary housing so that the auxiliary housing is at the same time the housing of the electric motor.
    It can also be provided that the auxiliary housing is arranged without the possibility of rotation and without other fastening means in recesses of the housing provided for this purpose. This can be achieved for example by the fact that recesses whose contours exactly correspond in cross section to those of the outer side of the auxiliary housing are provided in the housing so that the electric motor must only be pushed into these recesses and is therefore , mounted without possibility of rotation. It is obvious that to achieve this effect, a circular cross sectional contour is not appropriate. Any cross-sectional contour deviating from the circular shape, for example a square or a polygon, has against the described effect. For the axial attachment of the electric motor, it may be appropriate to provide fixing means which prevent axial displacement of the electric motor in the recesses of the housing. But this function can also be performed for example by the recesses for the auxiliary housing that are in the housing.
    In an improvement, it can be expected that the housing has no opening towards the atmosphere side. This embodiment has the advantage that vacuum tightness of the vacuum chamber is clearly facilitated. In this case, it is possible to give up the usual permanent and necessary vacuuming of the interior of the housing for the known drive terminal blocks. Only a passage of the current for the power supply of the electric motor is still necessary.
    It can also be provided that the electric motor is a servomotor and / or a brushless DC motor.
    The realization of the motor can also take place in such a way that the stator is inside and the rotor outside. The motor would be realized as an external armature motor or bell armature motor. In this case, there can be only one bearing which absorbs all the overturning torques and bearing forces that directly on the rotary passage or the motor shaft is caused to pass through the stator and is rotatably mounted on both sides as in an armature motor.
    The proposed support device will be explained in more detail below on the basis of exemplary embodiments and related drawings. It is shown in Figs. 1 and 6 a longitudinal section through a first embodiment for a support device outside or inside the vacuum chamber, FIGS. 2 and 7 a longitudinal section through a second embodiment for a support device outside or inside the vacuum chamber, FIGS. 3 and 8 a longitudinal section through a third embodiment for a support device outside or inside the vacuum chamber, FIGS. 4 and 9 a longitudinal section through a fourth embodiment for a support device outside or inside the vacuum chamber, and FIGS. 5 and 10 a longitudinal section through a fifth embodiment for a support device outside or inside the vacuum chamber.
    In Figs. 1 and 6 is shown a first embodiment of a support device, according to which the electric motor 4 is disposed inside the housing 22 and coaxially with the drive shaft 26. On the wall 11 of a vacuum chamber 1 is arranged a support device 2 on which is fixed a rotating target 3 which has a target tube 31 and a connector 32, a magnet system which is not visible in the drawing being disposed at the inside of the target 31 tube. The exemplary embodiment according to FIG. 1 relates to a support device 2 which is applied on the atmosphere side to the outside of the vacuum chamber 1 on the chamber wall 11, while the support device 2 of the embodiment according to FIG. 6 is applied on the empty side inside the vacuum chamber 1 on the chamber wall 11.
    The support device 2 is removably attached to a wall 11 of the vacuum chamber 1 by means of an isolation element 21. The support device 2 comprises a housing 22 with an opening 23 which is directed towards the 1 and forming a cavity 24. In this cavity 24 are provided two recesses 25 for a drive unit, which correspond to the cross-sectional contour of the auxiliary housing 41 of the drive unit so that that the drive unit can be introduced without possibility of rotation in the cavity 24 through the opening 23.
    The drive unit comprises, in the exemplary embodiment, the auxiliary housing 41, the ceramic drive shaft 26 with the metal wrapping element 27 and the electric motor 4 which comprises a stator 42 and a rotor 43 The stator 42 and the rotor 43 of the electric motor 4 are arranged directly in the auxiliary housing 41 so that the electric motor 4 does not need a separate motor housing.
    The auxiliary housing 41 is made of electrically insulating material. There are arranged the stator 42 and the rotor 43 of the electric motor 4, the rotor 43 being disposed on the drive shaft 44 which, therefore, simultaneously represents the ceramic drive shaft 26 with the enveloping element metal 27 of the support device 2 and is rotatably mounted on both sides in the auxiliary housing 41. The rotor 43 of the electric motor 4 is mounted directly; in this embodiment, in the auxiliary housing 41 so that the auxiliary housing 41 of the drive unit at the same time represents the housing of the electric motor 4. The end of the drive shaft 26 protruding by the opening 23 of the housing 22 inside the vacuum chamber 1 is designed to receive and transmit the rotational torque to the connection 32 of the rotary target 3.
    This end of the ceramic drive shaft 26 is rotatably and at the same time sealingly mounted in the auxiliary housing 41 via the metal wrapping element 27. A channel 45 which serves to connect a pump to empty and therefore opens out of the housing 22 opens into the region between two seals. The power supply of the electric motor 4 takes place via a connector 46 which also terminates outside the housing 22.
    In Figs. 2 and 7 is a second embodiment of a support device, according to which the electric motor 4 is disposed inside the housing 22 and coaxially with the drive shaft 26. On the wall 11 of a vacuum chamber 1 is arranged a support device 2 on which is fixed a rotating target 3 which has a target tube 31 and a connector 32, a magnet system which is not visible in the drawing being disposed at the inside of the target 31 tube. The exemplary embodiment according to FIG. 2 relates to a support device 2 which is applied on the atmosphere side to the outside of the vacuum chamber 1 on the chamber wall 11, while the support device 2 of the embodiment according to FIG. 7 is applied on the empty side inside the vacuum chamber 1 on the chamber wall 11.
    The support device 2 is removably attached to a wall 11 of the vacuum chamber 1 by means of an isolation element 21. The support device 2 comprises a housing 22 with an opening 23 which faces inwards. of the vacuum chamber 1 and forming a cavity 24. In this cavity 24 are provided two recesses 25 for a drive unit, which correspond to the cross-sectional contour of the auxiliary housing 41 of the drive unit so that the drive unit can be inserted without possibility of rotation into the cavity 24 through the opening 23.
    The drive unit comprises, in the exemplary embodiment, the auxiliary housing 41, the ceramic drive shaft 26 and the electric motor 4 which comprises a stator 42 and a rotor 43. The stator 42 and the rotor 43 of the electric motor 4 are arranged directly in the auxiliary housing 41 so that the electric motor 4 does not need a separate motor housing.
    The auxiliary housing 41 is made of electrically insulating material. There are arranged the stator 42 and the rotor 43 of the electric motor 4, the rotor 43 being disposed on the drive shaft 44 which, therefore, simultaneously represents the ceramic drive shaft 26 of the support device 2 and is rotatably mounted on both sides in the auxiliary housing 41. The rotor 43 of the electric motor 4 is mounted directly, in this embodiment, in the auxiliary housing 41 so that the auxiliary housing 41 of the drive unit at the same time represents the housing of the electric motor 4. The end of the drive shaft 26 protruding through the opening 23 of the housing 22 inside the vacuum chamber 1 is designed to receive and transmit the torque rotation at the connection 32 of the rotating target 3.
    This end of the ceramic drive shaft 26 is rotatably and at the same time sealed in the auxiliary housing 41. A channel 45 which serves to connect a vacuum pump and therefore opens out of the housing 22 opens in the area between two packings. The power supply of the electric motor 4 takes place via a connector 46 which also terminates outside the housing 22.
    In Figs. 3 and 8 is shown a third embodiment of a support device, according to which the electric motor 4 is disposed inside the housing 22 and coaxially with the drive shaft 26. On the wall 11 of a vacuum chamber 1 is arranged a support device 2 on which is fixed a rotating target 3 which has a target tube 31 and a connector 32, a magnet system which is not visible in the drawing being disposed at the inside of the target 31 tube. The exemplary embodiment according to FIG. 3 relates to a support device 2 which is applied on the atmosphere side to the outside of the vacuum chamber 1 on the chamber wall 11, while the support device 2 of the embodiment according to FIG. 8 is applied on the empty side inside the vacuum chamber 1 on the chamber wall 11.
    The support device 2 is removably attached to a wall 11 of the vacuum chamber 1 by means of an isolation element 21. The support device 2 comprises a housing 22 with an opening 23 which is directed towards the 1 and forming a cavity 24. In this cavity 24 are provided two recesses 25 for a drive unit, which correspond to the cross-sectional contour of the auxiliary housing 41 of the drive unit so that that the drive unit can be introduced without possibility of rotation in the cavity 24 through the opening 23.
    The drive unit comprises, in the exemplary embodiment, the auxiliary housing 41, the ceramic drive shaft 26 and the electric motor 4 which comprises a stator 42 and a rotor 43. The stator 42 and the rotor 43 of the electric motor 4 are arranged directly in the auxiliary housing 41 so that the electric motor 4 does not need a separate motor housing.
    The auxiliary housing 41 is made of electrically insulating material. There are arranged the stator 42 and the rotor 43 of the electric motor 4, the rotor 43 being disposed on the drive shaft 44. The end of the drive shaft 44 facing the vacuum chamber is designed as a metal wrapping element 27 wherein the ceramic drive shaft 26 of the support device 2 is rotatably mounted. The rotor 43 of the electric motor 4 is mounted directly, in this embodiment, in the auxiliary housing 41 so that the auxiliary housing 41 of the drive unit at the same time represents the housing of the electric motor 4. The end of the drive shaft 26 protruding through the opening 23 of the housing 22 within the vacuum chamber 1 is adapted to receive and transmit the rotational torque to the coupling 32 of the rotary target 3.
    This end of the ceramic drive shaft 26 is rotatably and at the same time sealingly mounted in the auxiliary housing 41 via the metal wrapping element 27. A channel 45 which serves to connect a pump to empty and therefore opens out of the housing 22 opens into the region between two seals. The power supply of the electric motor 4 takes place via a connector 46 which also terminates outside the housing 22.
    In Figs. 4 and 9 is shown a fourth embodiment of a support device, according to which the electric motor 4 is disposed inside the housing 22 and coaxially with the drive shaft 26. On the wall 11 of a vacuum chamber 1 is arranged a support device 2 on which is fixed a rotating target 3 which has a target tube 31 and a connector 32, a magnet system which is not visible in the drawing being disposed at the inside of the target 31 tube. The exemplary embodiment according to FIG. 4 relates to a support device 2 which is applied on the atmosphere side to the outside of the vacuum chamber 1 on the chamber wall 11, while the support device 2 of the embodiment according to FIG. 9 is applied on the empty side inside the vacuum chamber 1 on the chamber wall 11.
    The support device 2 is removably attached to a wall 11 of the vacuum chamber 1 by means of an isolation element 21. The support device 2 comprises a housing 22 with an opening 23 which is directed towards the 1 and forming a cavity 24. In this cavity 24 are provided two recesses 25 for a drive unit, which correspond to the cross-sectional contour of the auxiliary housing 41 of the drive unit so that that the drive unit can be introduced without possibility of rotation in the cavity 24 through the opening 23.
    The drive unit comprises, in the exemplary embodiment, the auxiliary housing 41, the drive shaft 26 with the metal wrapping element 27, the electric motor 4 and a transmission 5 arranged between the electric motor 4 and the drive shaft 26, which is connected on one side to the electric motor 4 and on the other side by a clutch 51 to the metal wrapping element 27 and therefore to the drive shaft 26. In this embodiment, the stator and the rotor of the electric motor 4 are housed in a motor housing which is their own and are therefore not directly visible in the drawing.
    The auxiliary housing 41 is made of electrically insulating material. The drive shaft 26 of the support device 2 is rotatably mounted in this auxiliary housing via the metallic wrapping element 27. The end of the drive shaft 26 protruding through the opening 23 of the housing 22 inside the vacuum chamber 1 is designed to receive and transmit the rotational torque to the connection 32 of the rotary target 3.
    This end of the ceramic drive shaft 26 is rotatably and at the same time sealingly mounted in the auxiliary housing 41 via the metal wrapping element 27. A channel 45 which serves to connect a pump to empty and therefore opens out of the vacuum chamber 1 opens into the region between two seals. The power supply of the electric motor 4 takes place via a connector 46 which also ends outside the vacuum chamber 1.
    In Figs. 5 and 10 is shown a fifth embodiment of a support device, according to which the electric motor 4 is disposed inside the housing 22 and coaxially with the drive shaft 26. On the wall 11 of a vacuum chamber 1 is arranged a support device 2 on which is fixed a rotating target 3 which has a target tube 31 and a connector 32, a magnet system which is not visible in the drawing being disposed at the inside of the target 31 tube. The exemplary embodiment according to FIG. 5 relates to a support device 2 which is applied on the atmosphere side to the outside of the vacuum chamber 1 on the chamber wall 11, while the support device 2 of the embodiment according to FIG. 10 is applied on the empty side inside the vacuum chamber 1 on the chamber wall 11.
    The support device 2 is removably attached to a wall 11 of the vacuum chamber 1 by means of an isolation element 21. The support device 2 comprises a housing 22 with an opening 23 which is directed towards the 1 and forming a cavity 24. In this cavity 24 are provided two recesses 25 for a drive unit, which correspond to the cross-sectional contour of the auxiliary housing 41 of the drive unit so that that the drive unit can be introduced without possibility of rotation in the cavity 24 through the opening 23.
    The drive unit comprises, in the exemplary embodiment, the auxiliary housing 41, the ceramic drive shaft 26 and the electric motor 4 which comprises a stator 42 and a rotor 43. The stator 42 and the rotor 43 of the electric motor 4 are arranged directly in the auxiliary housing 41 so that the electric motor does not need a separate motor housing. In this embodiment, the electric motor 4 is an external armature motor, the motor shaft 44 being passed through the stator 42 and being rotatably mounted on both sides in the auxiliary housing 41 as for an internal armature motor.
    The auxiliary housing 41 is made of electrically insulating material. There are arranged the stator 42 and the rotor 43 of the electric motor 4, the rotor 43 being disposed on the drive shaft 44. The end of the drive shaft 44 facing the vacuum chamber is designed as a metal wrapping element 27 wherein the ceramic drive shaft 26 of the support device 2 is rotatably mounted. The rotor 43 of the electric motor 4 is mounted directly, in this embodiment, in the auxiliary housing 41 so that the auxiliary housing 41 of the drive unit at the same time represents the housing of the electric motor 4. The end of the drive shaft 26 protruding through the opening 23 of the housing 22 within the vacuum chamber 1 is adapted to receive and transmit the rotational torque to the coupling 32 of the rotary target 3.
    This end of the ceramic drive shaft 26 is rotatably and at the same time sealingly mounted in the auxiliary housing 41 via the metal wrapping element 27. A channel 45 which serves to connect a pump to empty and therefore opens out of the housing 22 opens into the region between two seals. The power supply of the electric motor 4 takes place via a connector 46 which also terminates outside the housing 22.
    List of Part Numbers I Vacuum Chamber II Chamber Wall 2 Support Device 21 Insulation Element 22 Housing 23 Opening 24 Cavity 25 Recess 26 Drive Shaft 27 Enveloping Element 3 Rotary Target 31 Target Tube 32 Fitting 4 Electric Motor 41 Auxiliary Housing 42 Stator 43 Rotor 44 Motor Shaft 45 Channel 46 Connector 5 Transmission 51 Clutch
    Figures 1 to 10 Vakuum Empty
    Atm Atmosphere
    权利要求:
    Claims (13)
    [1]
    A support device (2) for a magnetron system with a rotating target, comprising a housing (22) with a rotatable non-conductive ceramic drive shaft (26) disposed in the housing (22), which is designed at its end accessible from the outside of the housing (22) to be connected directly or indirectly to the rotating target (3) and which is designed at its end located inside the housing (22) to induce a torque of rotation, characterized in that an electric motor (4) with a stator (42) and a rotor (43) for producing a rotational torque is disposed within the housing (22).
    [2]
    2. Support device according to claim 1, characterized in that the electric motor (4) is arranged coaxially with the drive shaft (26).
    [3]
    3. Support device according to claim 2, characterized in that the rotational torque is transmitted directly to the drive shaft (26).
    [4]
    4. Support device according to any one of claims 1 or 2, characterized in that a transmission (5) is disposed between the electric motor (4) and the drive shaft (26).
    [5]
    5. Support device according to claim 4, characterized in that the transmission (5) is a planetary gear.
    [6]
    6. Support device according to any one of claims 1 to 5, characterized in that the electric motor (4) is disposed in an auxiliary housing (41) of electrically non-conductive material and the drive shaft (26) is rotatably mounted in the auxiliary housing (41).
    [7]
    7. Support device according to any one of claims 1 to 6, characterized in that the rotor (43) of the electric motor (4) is arranged directly on the drive shaft (26) so that the shaft drive (26) is at the same time the drive shaft (44) of the electric motor (4).
    [8]
    8. Support device according to claim 6 or 7, characterized in that the stator (42) of the electric motor (4) is arranged directly in the auxiliary housing (41) so that the auxiliary housing (41) is at the same time the crankcase of the electric motor (4).
    [9]
    9. Support device according to any one of claims 6 to 8, characterized in that the auxiliary housing (41) is mounted without other fastening means and without possibility of rotation in recesses (25) of the housing (22) provided for this purpose.
    [10]
    10. Support device according to any one of claims 1 to 9, characterized in that the housing (22) has no opening towards the atmosphere side.
    [11]
    11. Support device according to any one of claims 1 to 10, characterized in that the electric motor (4) is a servomotor.
    [12]
    12. Support device according to any one of claims 1 to 11, characterized in that the electric motor (4) is a brushless DC motor.
    [13]
    13. Support device according to claim 13, characterized in that the ceramic drive shaft (26) has in the region which is inside the housing (22) a metal wrapping element (27) enveloping this region.
    类似技术:
    公开号 | 公开日 | 专利标题
    BE1019095A3|2012-03-06|TRAINING TERMINAL BLOCK FOR A MAGNETRON SYSTEM WITH A ROTARY TARGET.
    BE1019874A5|2013-02-05|SUPPORT DEVICE FOR A MAGNETRON SYSTEM WITH A ROTARY TARGET.
    EP0412858B1|1994-06-01|Electrical motor-pump with air-gap sleeve
    EP1365101B1|2008-07-16|Electromechanical drive for roller shutter
    CH655209A5|1986-03-27|BRUSHLESS ELECTRIC MICROMOTOR.
    FR2794190A1|2000-12-01|MOTOR DRIVEN COMPRESSOR
    FR2833917A1|2003-06-27|Electrically-powered steering device for automotive vehicle, has control substrate to which motor power terminals, torque detector terminals and motor driver terminals are extended, which is penetrated by steering shaft
    FR2729629A1|1996-07-26|MOTORIZED ASSISTED STEERING DEVICE
    EP0263010B1|1991-01-16|Device for feeding electrical apparatuses placed inside a faraday cage
    WO2014199343A1|2014-12-18|Electrical connection device for a compressor and compressor comprising such an electrical connection device
    FR2737944A1|1997-02-21|ELECTRIC MOTOR, IN PARTICULAR DRIVE MOTOR FOR PORTABLE ELECTRIC PUMP OR SUBMERSIBLE PUMP
    FR2842667A3|2004-01-23|MOTOR-REDUCER, PARTICULARLY FOR CONCRETE MIXERS, SPRAYERS AND SIMILAR MACHINES
    FR2965126A1|2012-03-23|PUMP MODULE
    BE1019093A5|2012-03-06|TRAINING TERMINAL BLOCK FOR A ROTARY MAGNETRON.
    FR2769146A1|1999-04-02|ELECTRIC MACHINE, PARTICULARLY, THREE-PHASE CURRENT ALTERNATOR WITHOUT COLLECTOR RING
    EP0787924A1|1997-08-06|Improvements to hydraulic anti-vibration devices
    FR2719875A1|1995-11-17|Improvement for hydraulic pump motor.
    WO2014072799A1|2014-05-15|Electrical connection device for a compressor and compressor comprising such a device
    EP0984548A1|2000-03-08|Electric motor for engagement with a transmission, especially with a motor vehicle transmission
    FR2936201A1|2010-03-26|Gear motor for windscreen wiper device of motor vehicle, has balancing membrane provided on case of interface, and through hole formed in and/or on connection element to allow exchange of air between inner volume of box and surrounding area
    FR2965989A1|2012-04-13|ELECTRIC MACHINE WITH CONTINUOUS CURRENT AND SYSTEM FORMED OF SUCH A MACHINE
    FR2801737A1|2001-06-01|Electric motor with fully sealed rotating parts, for fluid pump drive, has rotor within sealed compartment, driving external slip-ring shaft via magnetic coupling
    FR3029705A1|2016-06-10|ELECTRICAL MACHINE WITH POTENTIAL BALANCING DEVICE
    FR2730877A1|1996-08-23|MOTOR WITH CURRENT BRAKE DEVICE
    EP3465888B1|2021-04-28|Rotating electric machine comprising hermetic lids
    同族专利:
    公开号 | 公开日
    US20110147209A1|2011-06-23|
    DE102009056241B4|2012-07-12|
    DE102009056241A1|2011-06-09|
    US8828199B2|2014-09-09|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US20060000705A1|2004-07-01|2006-01-05|Klaus Hartig|Cylindrical target with oscillating magnet for magnetron sputtering|
    US20080012460A1|2006-03-17|2008-01-17|Angstrom Sciences, Inc.|Magnetron for cylindrical targets|
    WO2008035965A2|2006-09-22|2008-03-27|Asml Netherlands B.V.|Apparatus comprising a rotating contaminant trap|
    US20090258739A1|2008-04-11|2009-10-15|Von Ardenne Anlagentechnik Gmbh|Drive end-block for a rotatable magnetron|
    DE102008033904A1|2008-07-18|2010-01-28|Von Ardenne Anlagentechnik Gmbh|Drive end block for a magnetron assembly with a rotating target|
    US5096562A|1989-11-08|1992-03-17|The Boc Group, Inc.|Rotating cylindrical magnetron structure for large area coating|
    US5200049A|1990-08-10|1993-04-06|Viratec Thin Films, Inc.|Cantilever mount for rotating cylindrical magnetrons|
    CH690805A5|1993-05-04|2001-01-15|Unaxis Balzers Ag|Magnetic-assisted atomization and vacuum treatment system herewith.|
    DE19525704C1|1995-07-14|1996-07-25|Grundfos As|Encapsulated rotor for asynchronous motor in circulation pump|
    US6736948B2|2002-01-18|2004-05-18|Von Ardenne Anlagentechnik Gmbh|Cylindrical AC/DC magnetron with compliant drive system and improved electrical and thermal isolation|
    WO2005005682A1|2003-07-04|2005-01-20|Bekaert Advanced Coatings|Rotating tubular sputter target assembly|
    EP1799876B1|2004-10-18|2009-02-18|Bekaert Advanced Coatings|Flat end-block for carrying a rotatable sputtering target|DE102010031259B4|2010-07-12|2012-07-12|Von Ardenne Anlagentechnik Gmbh|Support device for a magnetron arrangement with a rotating target|
    DE102013106168B4|2013-06-13|2015-02-12|Von Ardenne Gmbh|Cantilever magnetron with a rotating target|
    DE102013113562B4|2013-12-05|2018-10-04|VON ARDENNE Asset GmbH & Co. KG|Bearing assembly for rotatably supporting an electrode and electrode assembly|
    DE102015107809B3|2015-05-19|2016-07-28|Von Ardenne Gmbh|End block assembly, processing assembly therewith, bearing assembly, and method of making a bearing assembly|
    BE1024754B9|2016-11-29|2018-07-24|Soleras Advanced Coatings Bvba|A UNIVERSAL MOUNTABLE END BLOCK|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    DE102009056241|2009-12-01|
    DE200910056241|DE102009056241B4|2009-12-01|2009-12-01|Support device for a magnetron arrangement with a rotating target|
    [返回顶部]